PECVD System

High vacuum CVD system is a special equipment for growing high-quality graphene, carbon nanotubes and silicon carbide on the bottom materials.

It is widely used in the fields of semiconductor, nano materials, carbon fiber, silicon carbide, coating and other new materials.

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Technical Data

1. SUS304 is made of pure aluminum oxide and has high vacuum curing performance.

2. A pair of slide rails are installed at the bottom of the furnace, which can move smoothly. It can slide from one end to the other manually to realize fast heating and cooling. The furnace cover can be opened to observe the heated materials in real time.

3. Using high purity quartz tube, it has strong chemical stability, corrosion resistance and very small thermal expansion coefficient under high temperature.

4. SUS304 stainless steel fast flange is adopted. High vacuum can be obtained by sealing tightly with high temperature "O" ring. One clamp can complete the connection of flange, and it is convenient and fast to put and take materials.

5. The heating element is made of Cornell heating wire, with high surface load and durability. The maximum temperature is 1200 ℃ and the heating rate is 10 ℃ / min.

6. Optional multi-channel mass flowmeter, digital display, automatic control of gas flow; built-in stainless steel gas mixing box, each gas pipeline is equipped with check valve, and the gas flow can be adjusted through the knob on the control panel.

7. Plasma RF power supply: the maximum RF power is 500W, the output frequency is 13.56MHz ± 0.005%, the input power supply is 208-240vac, single-phase 50 / 60Hz.

Specifications

1200℃ Tube Furnace
No	Temp zone	Type		*Diatube size(mm)**	heating zone(mm)	flat-temperature zone(mm)	Outer dia(mm)	Max temp(℃)	Working temp(℃)	Power(kw)	Voltage(V)
B1	Single	HTF1200-2.5/20		φ25*450	200	50	φ25	1200	1100	1.7	220
B2		HTF1200-5/20		φ50*450	200	50	φ50	1200	1100	1.7	220
B3		HTF1200-6/30		φ60*1000	300	80	φ60	1200	1100	3	220
B4		HTF1200-8/30		φ80*1000	300	80	φ80	1200	1100	3	220
B5		HTF1200-10/30		φ100*1000	300	80	φ100	1200	1100	3	220
B6		HTF1200-6/90		φ60*1400	900	300	φ60	1200	1100	6	220
B7		HTF1200-8/90		φ80*1400	900	300	φ80	1200	1100	6	220
B8		HTF1200-10/90		φ100*1400	900	300	φ100	1200	1100	6	220
B9		HTF1200-13/90		φ130*1400	900	300	φ130	1200	1100	6	220
B10		HTF1200-15/90		φ150*1400	900	300	φ150	1200	1100	6	220
B11		HTF1200-21/90		φ210*1400	900	300	φ210	1200	1100	6	220
B12		HTF1200-28/90		φ280*1400	900	300	φ280	1200	1100	6	220
B3-2	Double	HTF1200-6/40-II		φ60*1000	400	200	φ60	1200	1100	4	220
B4-2		HTF1200-8/40-II		φ80*1000	400	200	φ80	1200	1100	4	220
B5-2		HTF1200-10/40-II		φ100*1000	400	200	φ100	1200	1100	4	220
B3-3	Triple	HTF1200-6/60-III		φ60*1200	600	450	φ60	1200	1100	4	220
B4-3		HTF1200-8/60-III		φ80*1200	600	450	φ80	1200	1100	4	220
B5-3		HTF1200-10/60-III		φ100*1200	600	450	φ100	1200	1100	4	220
B6-3		HTF1200-6/90-III		φ60*1400	900	600	φ60	1200	1100	9	220
B7-3		HTF1200-8/90-III		φ80*1400	900	600	φ80	1200	1100	9	220
B8-3		HTF1200-10/90-III		φ100*1400	900	600	φ100	1200	1100	9	220
B9-3		HTF1200-13/90-III		φ130*1400	900	600	φ130	1200	1100	9	220
B10-3		HTF1200-15/90-III		φ150*1400	900	600	φ150	1200	1100	9	220
B11-3		HTF1200-21/90-III		φ210*1400	900	600	φ210	1200	1100	9	220
B12-3		HTF1200-28/90-III		φ280*1400	900	600	φ280	1200	1100	9	220
B6-5	Quintuple	HTF1200-6/90-V		φ60*1400	900	750	φ60	1200	1100	9	220
B7-5		HTF1200-8/90-V		φ80*1400	900	750	φ80	1200	1100	9	220
B8-5		HTF1200-10/90-V		φ100*1400	900	750	φ100	1200	1100	9	220
B9-5		HTF1200-13/90-V		φ130*1400	900	750	φ130	1200	1100	9	220
B10-5		HTF1200-15/90-V		φ150*1400	900	750	φ150	1200	1100	9	220
B11-5		HTF1200-21/90-V		φ210*1400	900	750	φ210	1200	1100	9	220
B12-5		HTF1200-28/90-V		φ280*1400	900	750	φ280	1200	1100	9	220
1400℃ Tube Furnace
No	Temp zone	Type		*Diatube size(mm)**	heating zone(mm)	flat-temperature zone(mm)	Outer dia(mm)	Max temp(℃)	Working temp(℃)	Power(kw)	Voltage(V)
B3	Single	HTF1400-6/30		φ60*1000	300	150	φ60	1400	1300	7	220
B4		HTF1400-8/30		φ80*1000	300	150	φ80	1400	1300	7	220
B5		HTF1400-10/30		φ100*1000	300	150	φ100	1400	1300	7	220
B3-2	Double	HTF1400-6/40-II		φ60*1000	400	250	φ60	1400	1300	7	220
B4-2		HTF1400-8/40-II		φ80*1000	400	250	φ80	1400	1300	7	220
B5-2		HTF1400-10/40-II		φ100*1000	400	250	φ100	1400	1300	7	220
B3-3	Triple	HTF1400-6/60-III		φ60*1200	600	450	φ60	1400	1300	9	220
B4-3		HTF1400-8/60-III		φ80*1200	600	450	φ80	1400	1300	9	220
B5-3		HTF1400-10/40-III		φ100*1200	600	450	φ100	1400	1300	9	220
1600℃ Tube Furnace
No	Temp zone	Type		*Diatube size(mm)**	heating zone(mm)	flat-temperature zone(mm)	Outer dia(mm)	Max temp(℃)	Working temp(℃)	Power(kw)	Voltage(V)
B3	Single	HTF1600-6/30		φ60*1000	300	150	φ60	1600	1500	7	220
B4		HTF1600-8/30		φ80*1000	300	150	φ80	1600	1500	7	220
B5		HTF1600-10/30		φ100*1000	300	150	φ100	1600	1500	7	220
B3-2	Double	HTF1600-6/40-II		φ60*1000	400	250	φ60	1600	1500	7	220
B4-2		HTF1600-8/40-II		φ80*1000	400	250	φ80	1600	1500	7	220
B5-2		HTF1600-10/40-II		φ100*1000	400	250	φ100	1600	1500	7	220
B3-3	Triple	HTF1600-6/60-III		φ60*1200	600	450	φ60	1600	1500	9	220
B4-3		HTF1600-8/60-III		φ80*1200	600	450	φ80	1600	1500	9	220
B5-3		HTF1600-10/60-III		φ100*1200	600	450	φ100	1600	1500	9	220
1700℃/1750℃ Tube Furnace
No	Temp zone	Type		*Diatube size(mm)**	heating zone(mm)	flat-temperature zone(mm)	Outer dia(mm)	Max temp(℃)	Working temp(℃)	Power(kw)	Voltage(V)
B3	Single	HTF1700-6/30		φ60*1000	300	150	φ60	1700	1600	7	220
B4	Single	HTF1700-8/30		φ80*1000	300	150	φ80	1700	1600	7	220
B3-2	Double	HTF1700-6/40-II		φ60*1000	400	250	φ60	1700	1600	7	220
B4-2		HTF1700-8/40-II		φ80*1000	400	250	φ80	1700	1600	7	220
B5-2		HTF1700-10/40-II		φ100*1000	400	250	φ100	1700	1600	7	220
B3-3	Triple	HTF1700-6/60-III		φ60*1200	600	450	φ60	1700	1600	9	220
B4-3		HTF1700-8/60-III		φ80*1200	600	450	φ80	1700	1600	9	220
B5-3		HTF1700-10/60-III		φ100*1200	600	450	φ100	1700	1600	9	220
B1	Single	HTF1750-5/20		φ50*800	200	100	φ50	1750	1700	4	220
B2		HTF1750-6/20		φ60*800	200	100	φ60	1750	1700	4	220
B1		HTF1800-5/20		φ50*800	200	100	φ50	1800	1750	4	220
B2		HTF1800-6/20		φ60*800	200	100	φ60	1800	1750	4	220
Vertical Tube Furnace
No		Type		*Diatube size(mm)**	heating zone(mm)	flat-temperature zone(mm)	Outer dia(mm)	Max temp(℃)	Working temp(℃)	Power(kw)	Voltage(V)
B1		HTF1200-2.5/20-VT		φ25*450	200	80	25	1200	1100	1.7	220
B2		HTF1200-5/20-VT		φ50*450	200	80	50	1200	1100	1.7	220
B3		HTF1200-6/30-VT		φ60*1000	400	150	60	1200	1100	1.7	220
B4		HTF1200-8/30-VT		φ80*1000	400	150	80	1200	1100	1.7	220
B3		HTF1400-6/30-VT		φ60*1000	300	150	φ60	1400	1300	7	220
B4		HTF1400-8/30-VT		φ80*1000	300	150	φ80	1400	1300	7	220
B3		HTF1400-6/30-VT		φ60*1000	300	150	φ60	1400	1300	7	220
B4		HTF1400-8/30-VT		φ80*1000	300	150	φ80	1400	1300	7	220
Rotate Tube Furnace
No		Temp zone	Type		*Diatube size(mm)**	heating zone(mm)	flat-temperature zone(mm)	Outer dia(mm)	Max temp(℃)	Working temp(℃)	Power(kw)
B3		Single	HTF1200-6/30-R		φ60x1000	300	100	Φ100	1200	1100	3
B3		Double	HTF1200-6/30-II-R		φ80x1000	300	150	Φ100	1200	1100	3
1200℃ Fast Annealing Furnace
No		Temp zone	Type		*Diatube size(mm)**	heating zone(mm)	flat-temperature zone(mm)	Outer dia(mm)	Max temp(℃)	Working temp(℃)	Power(kw)
B3		Single	HTF1200-6/30-L		φ60x1000	300	100	φ60	1200	1100	3
B4		Single	HTF1200-8/30-L		φ80x1000	300	150	φ80	1200	1100	3
Air supply system					RF power supply
Type	Number of channels	Dimension（mm)W×H×L		Type of flowmeter	Type	Power	Dimension（mm)W×H×L		Configure
HTF-2F	2	230×260×390		Rotameter	HTF-RF1	5 -300W Adjusted	330×410×260		Output power: 5-300w, RF power frequency: 13.56 MHz, maximum reverse power: 200W
HTF-3F	3	290×490×450		Rotameter
HTF-4F	4	290×490×450		Rotameter
HTF-2M	2	430×460×590		Mass flowmeter	HTF-RF2	5 -500W Adjusted	350×420×280		Output power: 5-500w, RF power frequency: 13.56mh, maximum reverse power: 200W
HTF-3M	3	430×460×590		Mass flowmeter
HTF-4M	4	430×460×590		Mass flowmeter

Application

Tube furnace is a new type of electric furnace with high performance and high energy saving developed by adopting international advanced technology. There are many kinds of tube furnace types, such as single tube, double tube, horizontal, openable, vertical, single temperature zone, double temperature zone and three temperature zone.

It is mainly used in experiments and small batch production in colleges, scientific research institutes, industrial and mining enterprises.

The utility model has the advantages of safety and reliability, simple operation, high temperature control precision, good heat preservation effect, wide temperature range, high uniformity of furnace temperature, multiple temperature zones, optional atmosphere and vacuum furnace type。

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Tel: +86 21 5109 5281
Email: haoyue@haoyue-group.com
Office Add: Building B2, 7301 Jiasong North Road, Jiading District, Shanghai

Factory Add: No.1 Jufeng Science and Technology Industrial Park, Tongzhou District, Nantong Jiangsu